Mode analysis of GaN two-dimensional photonic crystal nanocavities undercut by photo-electrochemical etching
نویسندگان
چکیده
Abstract GaN two-dimensional (2D) photonic crystal nanocavities with a single embedded InGaN quantum well are undercut by photo-electrochemical (PEC) etching and optically characterized to investigate the fundamental mode. The PEC selectively removes an InGaN-based sacrificial layer form air-suspended cavity slabs. We investigated resonant modes of micro-photoluminescence spectroscopy measurement at room temperature. wavelengths measured peaks their dependence on period agreed numerical analysis, allowing us determine mode in spectra. highest quality factor for reached 3400 blue wavelengths. This work would contribute improvement 2D using as applications towards integrated light sources visible
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ژورنال
عنوان ژورنال: Japanese Journal of Applied Physics
سال: 2023
ISSN: ['0021-4922', '1347-4065']
DOI: https://doi.org/10.35848/1347-4065/acba80